Microsystem Design 1st ed. 2000. Corr. 2nd printing 2004 Edition

In 23 chapters, Senturia brings together a dizzying array of fields of engineering necessary to design micro-electro-mechanical systems (MEMS) and examples of MEMS products. For instance, he covers Euler beam theory, the Navier-Stokes equation, micromachining, feedback circuits, and electronic noise, and then anchors these topics with a gyroscope and a DNA amplifier, among other devices.Senturia's approach to some chapters strikes me as a little idiosyncratic, but he does convey the principles quite well. His love for the material shines through in a way that many authors cannot manage.Unlike books on single topics, this text cannot be used as a definitive guide to anything. Because Sentuira only has only 30 pages or so for each of the very broad topics that he covers, he doesn't cover any of them in much depth. However, the reader does get a sense of the issues that each physical domain presents. For those who need to know more, Senturia provides a short list of further reading in each chapter. I think of this book as a comprehensive starting point that can help me determine what further investigation I need.Aesthetically, the text is somewhat lacking. The small pages are cramped compared to those of larger-format texts, and the figures are subpar.

This book is definitely a must-have for anyone interested in MEMS design. It's one of the classic references on microsystems that everyone should have read at least once.The sections on mathematical modeling are especially good, and the set of detailed examples at the end are clear and illustrative.To name some drawbacks, the chapter on fabrication is maybe a bit out of date, and more solved practical exercises are missing.

This book is a good graduate level MEMS book, but do not think that you will be able to design a MEMS chip after just reading. I bought this one as a part of MEMS Design course at Northeastern University. MEMS students should be familiar with pSpice circuit simulation and Matlab in order to even start thinking of designing MEMS. Microfabrication, the way it is explained here, is very brief, and not very useful.

Quite good. The tracking is ok. The book is what i needed. But seems not so up to date. It is really a classic basic book.

The book is very well written and discussed both aspects of MEMS - fabrication and design.Fabrication part is well written and can be clearly understood. I was really impressed with the design part of the book - lumped systems, etc.Good book for grad students.

I liked reading about MEMS. It has many examples and information. I could have seen more writting on how to start making a device, but overall, it was an informative textbook.

our teacher wasn't very good, this book was a little more helpful than her

The book tries to cover different aspects and fields involved in the microsystems design (MEMS).The book scope is very broad in a sense that makes it miss essential details and concepts.It may work as a first introduction to the subject for students approaching the subjects for their first time, but it can't serve as a reference. It is simply very shallow and the topic is too broad to be lumped in a single book.

Libro avanzato eppure comprensibile. Qualche passaggio nelle dimostrazioni è tralasciato ma niente che uno studente magistrale non sappia intuire da sé.

Book is an excellent introduction to micro-sensor/system design